000 00482nam a2200205Ia 4500
999 _c12657
_d12657
003 OSt
005 20191105214159.0
008 160427s9999 xx 000 0 und d
020 _a9788126517909
040 _cLIRC
082 _a621.38171 GHA
100 _aGhandhi, Sorab K.
245 _aVLSI fabrication principles
_bsilicon and gallium arsenide
250 _a2nd
260 _aNew Delhi
260 _bWiley
260 _c2010
300 _a834 p.
942 _2ddc
_cBK